蘇州新露源環(huán)?？萍加邢薰?/title>
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<h1 class="m-t-10 m-b-5">電子行業(yè)專用超純水設備應用領域</h1>
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<span>2019-06-24 17:41:19</span>
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<span> <i class="icon wb-eye m-r-5" aria-hidden="true"></i> <i class="eyou_arcclick" style="font-style:normal">224</i>
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<p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">電子制造應關注超純水水質，在大規(guī)模IC的超純水水質中，優(yōu)先關注的水質指標為：電阻率、微粒、TOC(總有機硅)、硅、堿金屬、堿土金屬、重金屬、溶解氧、在超純水中，細菌的影響與TOC、微粒基本相同，在IC光刻工序的清洗用水中假如含有不純物質或微粒，將導致柵氧化膜厚度不均，產(chǎn)品圖形發(fā)生缺陷，耐壓性變差，超純水中的微量有機物會使產(chǎn)品結晶不良，在IC芯片制造過程中，與硅片接觸的水所含離子越多，對產(chǎn)品良率影響就越大。電阻率反映了超純水中離子的含量，超純水的電阻率越高，其純度也就越高。一般來講，在25℃時，理論純水的電阻率是18.25MΩ·cm。</span></p><p><br/></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">應用領域：半導體材料、光電子產(chǎn)品、高科技精微產(chǎn)品超純水設備；</span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">水源：市政自來水 水質要求：a、電阻率：≥18.2MΩ/cm</span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">壓力：0.35MPa b、TOC： ＜10mg/L </span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">溫度：25℃ C:Particle：＜0.1μm</span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">PH： 6-8 d:Particle：＜0.2μm</span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">有機物：（TOC）≤0.5 （建議為零） 重金屬：（Fe、Mn）≤0.01mg/L </span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;"> </span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">工藝流程;</span></p><p><span style="font-family: 微軟雅黑, "Microsoft YaHei"; font-size: 14px;">原水→預處理→保安過濾器→中間水箱→一級高壓泵→一級RO反滲透裝置→一級RO水箱→二級高壓泵→二級RO反滲透裝置→二級RO水箱→EDI增壓泵→EDI(CEDI)電去離子水系統(tǒng)→氮封水箱→核子級拋光混床→終端精密過濾器→UV紫外線殺菌→終端用水點。</span></p><p><br/></p> </section>
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